Мікроелектронний пристрій для виміру вологості

Abstract

The invention relates to the sphere of checking and measuring engineering and can be used as a humidity sensor in various appliances of automatic control of production methods. The microelectronic device for humidity measurements includes two humidity-sensitive field-effect transistors and a source of constant voltage, two resistors, a capacity, the third humidity-sensitive field-effect transistor and the second source of constant voltage, at that the first pole terminal of the first source of the constant voltage is connected to the first lead terminal of the first resistor and the second lead terminal of the first resistor is connected to the control gate of the first humidity-sensitive field-effect transistor which output and cushion are connected to the output and cushion of the second humidity-sensitive field-effect transistor, at that the drainage of the first humidity-sensitive field-effect transistor is connected with the control gate of the third humidity-sensitive field-effect transistor and its output which is connected to the first lead terminal of the first capacity, and the second lead terminal of the first capacity is connected to the cushion of the third humidity-sensitive field-effect transistor and the first terminal lead of the second resistor, and the second terminal lead of the second resistor is connected to the drainage of the third humidity-sensitive field-effect transistor.