Радіовимірювальні перетворювачі для визначення товщини плівок на основі пристроїв з від’ємним опором

Abstract

Thesis is devoted to developing a new class of converters to determine the film thickness, the principle of which is based on the functional dependence of generation frequency transistor structure with negative resistance of the material thickness changes measured, providing opportunities to increase the sensitivity and resolution metrology tools. The thesis was a theoretical approach to creating mathematical models of the radiomeasur-ing converters to determine the thickness based devices with negative resistance by method of the state variables. First developed and experimentally tested the adequacy of mathematical models of dynamic radio measuring transducers for determining the thickness of films based on negative re-sistance devices in time domain, allowing to determine the change magnitude of currents and volt-ages in time and get the transfer function and sensitivity of the developed facilities. A computer program in the computing environment «Maple» for modeling and calculation of dynamic charac-teristics of sensors with regard to dependence of elements of circuit devices from the effects of thickness. Provided recommended converters designed for use in different systems of production of films and coatings.