Пристрій для випарювання матеріалів

Abstract

A mechanism for the evaporation of materials contains processing chamber, in which disposed are heater, crucible, vapor collector, microprocessor system for heater control and system for measurement and vapor density control being installed outside the processing chamber. Into the crucible and the vapour collector introduced are calorimetric measuring devices of heater and vapor collector power with outlets connected to the inlet of microprocessor system for the heater control.