Вплив шорсткості поверхні комутуючих елементів НВЧ перетворювачів на ємність системи

Abstract

In this article the intensive development of radio engineering devices and communication systems is described and analyzed. The characteristics of such devices have been improved due to the use of microelectromechanical systems (MEMS), which uses various types of switching elements based on MEMS. Application of converters based on MEMS has allowed providing low input energy losses, power management, cost of production and high reliability of such devices.

It is proved that one of the most important characteristics of such radio engineering devices and communication systems is the roughness of the surface of the switching elements (keys), to which the specific requirements for the mechanical processing of the switching surface, as well as the thickness of the applied layer of the dielectric on the surface of the commuting elements are put forward. It is proved that with increasing roughness of the surface there is a decrease in the capacity in the lower position of the membrane. Therefore, in order to obtain the optimal ratio of capacities, it is necessary to ensure that the surfaces of the microsystem are roughened as little as possible. It is determined that the main properties of dielectric active media are mechanical and electrical interconnected ones.

In the article the dependence between the roughness of elastic commuting elements and the capacitance that arises between the elastic element and the dielectric basis is considered. The proposed results make it possible to understand the necessity of implementing elastic elements with a high degree of surface finish to ensure uninterrupted control of the system when receiving incoming TV signals. Using the proposed methodology for calculating MEMS designs with electromagnetic active media, a model has been designed and manufactured as an experimental setup for studying a controlled C polarization converter on MEMS structures.