Мікроелектронний вимірювач тиску з частотним виходом

Abstract

Microelectronic pressure measuring device with frequency output relates to control-measuring equipment and can be used as pressure indicator in different devices of automated control. Pressure measuring device has tensioresistive bridge on semiconductor membrane made of four tensoresistors, field transistor, two bipolar transistors, two vessels and seven resistors. All the elements of the measuring device are fed from source of direct voltage. At effect of pressure on membrane output voltage from arms of tensoresistive bridge, this leads to change of capacitor component of total resistance on electrodes drain-collector of field transistor and first bipolar transistor and change of resonance frequency of oscillatory circuit. Due to design solution for measuring device transformation of pressure to frequency is achieved, this increases sensitivity and accuracy of measurement of pressure.