Radiomeasuring pressure transducer with sensitive MEMS Capacitor
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In the article the pressure transducer with frequency output based on the structure of the bipolar-field transistors with negative resistance and tenso sensitive MEMS capacitor has been considered. A mathematical model of the radiomeasuring pressure transducer in dynamic regime has been developed that allowed to determine the voltage or current in the circuit at any given moment in time when acting this pressure. Analytical expressions of the conversion function and sensitivity equation has been received. The sensitivity of the developed device is between 0.98 kHz/kPa to 1.67 kHz/kPa.
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Radiomeasuring pressure transducer with sensitive MEMS Capacitor [Text] / A. V. Osadchuk, V. S. Osadchuk, I. A. Osadchuk [etc.] // Przeglad Elektrotechniczny. – 2017. – R. 93, NR 3. – P. 113-116.
Osadchuk A. V., Osadchuk V. S., Osadchuk I. A., Kisała P., Zyska T., Annabaev A., Mussabekov K. Radiomeasuring pressure transducer with sensitive MEMS Capacitor. Przeglad Elektrotechniczny. 2017. R. 93, NR 3. P. 113-116.
Osadchuk A. V., Osadchuk V. S., Osadchuk I. A., Kisała P., Zyska T., Annabaev A., Mussabekov K. Radiomeasuring pressure transducer with sensitive MEMS Capacitor. Przeglad Elektrotechniczny. 2017. R. 93, NR 3. P. 113-116.