Радіовимірювальний сенсор тиску з частотним виходом

Abstract

In the master's qualification work, an analysis of the current level of develop-ment of radio pressure sensors with frequency output was conducted, which allowed to identify possible ways to improve their parameters and characteristics. Analysis of publications on theoretical and experimental studies of defor-mation effects in MEMS structures and designs of pressure sensors based on them shows that the development of radio pressure sensors with frequency output is a promising direction in the development of pressure measuring hardware for modern microprocessor control and management systems. Resonant MEMS pressure sensors represent high metrological indicators along with the tendency to miniaturization, improvement of cost characteristics, possibility of their intellectualization on the ba-sis of constructive and technological compatibility with digital devices of processing of the measured information. Analytical expressions are obtained, which are used to determine the sensitivi-ty equation and the conversion function of radio pressure sensors with frequency output based on bipolar pressure-sensitive transistor semiconductor structures with negative differential resistance. Radio-measured pressure sensors with frequency output based on pressure-sensitive bipolar transistor semiconductor structures with the capacitive nature of the reactive component of the structure impedance have been developed. Experimental studies conducted in the work showed that the sensitivity of the developed radio pressure sensors with frequency output based on bipolar pressure-sensitive transis-tor structures with negative differential resistance is 3.0 to 5.5 kHz/kPa in the pres-sure range 1*105 Pa - 12*105 Pa. Metrological estimation of measurement errors of radio measuring pressure sensors with frequency output is carried out. The total er-ror of the radio pressure sensor with the frequency output signal is equal to . In the economic part of the product design were calculated costs for research and development work, which amounted to 129066,29 UAH. and determined the production cost of a unit of a new technical solution, which amounted to 2885.73 UAH., determined the net profit (161390.34 UAH.), which can be obtained by the manufacturer within one year from the sale of 500 pcs. of this development. The section on labor protection and safety in emergency situations addressed such issues as technical solutions for occupational health and industrial sanitation, deter-mination of the thickness of the solid screen for protection against EMR, technical solutions for industrial and fire safety.