Розробка радіовимірювальних мікроелектронних перетворювачів температури на основі структури метал-сегнетоелектрик-напівпровідник

Abstract

In the paper modern technologies of ferroelectric| thin films, methods of construction of radiomeasuring | microelectronic transformers of temperature are analyzed. A new method of measuring of temperature on the basis of combined ferroelectric thin | films and transistors structures with negative resistance was offered and electric circuits of radiomeasuring | microelectronic transformers of temperature on the basis of structure metal-ferroelectric-semiconductor were developed.