Мікроелектронний частотний витратомір газу

Abstract

Microelectronic gas flow rate meter relates to control-measuring equipment. Device consists of measuring chamber and two sources of direct voltage that through resistors perform feeding of first thermo-sensitive, second and third bipolar transistors. Emitters of first thermo-sensitive and second bipolar transistors are connected to each other. Oscillatory circuit is formed by capacitor component of total resistance on electrodes collector-collator of first thermo-sensitive and second bipolar transistor and inductive component of total resistance on electrodes emitter-collector of third bipolar transistor. At gas passage through measuring chamber where first thermo-sensitive bipolar transistor is placed its total resistance is changed, this leads to change of capacity component of total resistance on electrodes collector-collector of first thermo-sensitive and second bipolar transistor, this leads to change of resonance frequency of vibrational circuit. Device provides increase of accuracy of measurement of gas flow rate.