Мікроелектронний шестизондовий пристрій для вимірювання напівпровідникового опору

Abstract

A microelectronic six-probe device for measuring semiconductor resistance comprises an inductance coil and a capacitance connected to a power source. In the device there are introduced six probes, second and third power sources, two resistors, a bipolar transistor connected to the inductance coil and the second power source, and a field effect transistor, to which the third and forth probes are connected.