Мікроелектронні частотні перетворювачі вологості

Abstract

Microelectronic frequency humidity transducers with capacitive element made on the basis of moisture-sensitive porous lay-ers, have been developed. It has been theoretically and experimentally proved the circuit designs and physical and chemical prop-erties of the moisture sensitive layer of the capacitive element significantly affect the sensitivity of the humidity transducer and the range of its measurement. It was found that the most sensitive is a transducer with a capacitive element made on the basis of amorphous silicon.