Пристрій для вимірювання оптичного випромінювання з активним індуктивним фоточутливим елементом

Abstract

The invention relates to means of inspection technology for measuring optical radiation with an active inductance photosensitive member. An optical radiation measuring device with an active inductance photosensitive member comprises a first DC voltage source, a first MIS light-activated transistor, two capacitors, two resistors. Additionally, the device comprises second and third MIS light-activated transistors, with all transistors being performed with a transparent gate electrode sensitive to optical radiation, a substrate surface free from dielectric and sensitive to optical radiation has slots above a MIS-transistor channel, cross-section A each of which satisfies the ratio: A<s/n, where S – aria of MIS light-activated transistor channel, n – a number of slots, a second DC source, a first terminal of the first DC source is connected to first terminal of a first resistor, second terminal of the first resistor is connected to gate of the first MIS light-activated transistor, drain of which is connected to first lead of a first capacitor, gate and source of the second MIS light-activated transistor and gate of the third MIS light-activated transistor, which forms a first output terminal. Source of the first MIS light-activated transistor is connected to drain and substrate of the third MIS light-activated transistor, second lead of the first capacitor is connected to substrate of the second MIS light-activated transistor and first terminal of the second resistor. Second terminal of the second resistor is connected to drain of second MIS light-activated transistor, first lead of the second capacitor and a first pole of the second DC source, a second pole of the second DC source is connected to second lead of the second capacitor, source of the third MIS light-activated transistor and second pole of the first DC source, which form a utility bus to which a second output terminal is connected. The invention provides enhance of sensitivity, accuracy and extension of boundaries of measurement.