Vacuum nanoscale carbon coatings

Abstract

This article illustrates the problem ensuring homogeneity and uniformity of nanoscale coatings obtained in vacuum by carbon vapor deposition. Carbon vapors are obtained by heating in a vacuum with one or more electron beams a water-cooled crucible, which is covered with a molten layer of refractory metal. Due to the peculiarities of the trajectory of the movement of carbon vapors the crucible to the substrate, a situation may arise with the formation of a \"visor\" type defect on the coating, which prevents the uniformity of the coating.